Optimization of MEMS fabrication process design by virtual experiments
- Author(s):
T. Schmidt ( Univ. of Siegen (Germany) ) K. Hahn ( Univ. of Siegen (Germany) ) T. Binder ( Silvaco Technology Ctr. (United Kingdom) ) J. Popp ( Cavendish Kinetics (Netherlands) ) A. Wagener ( Univ. of Siegen (Germany) ) R. Brueck ( Univ. of Siegen (Germany) ) - Publication title:
- Micro- and nanotechnology : materials, processes, packaging, and systems III : 11-13 December 2006, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6415
- Pub. Year:
- 2007
- Paper no.:
- 64150R
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819465238 [0819465232]
- Language:
- English
- Call no.:
- P63600/6415
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |