Fabrication of high-aspect-ratio coil for electromagnetic actuators using LIGA process

Fabrication of high-aspect-ratio coil for electromagnetic actuators using LIGA process

Author(s):

D. Noda ( Univ. of Hyogo (Japan) )
Y. Matsumoto ( Univ. of Hyogo (Japan) )
S. Yamashita ( Univ. of Hyogo (Japan) )
M. Setomoto ( Univ. of Hyogo (Japan) )
T. Hattori ( Univ. of Hyogo (Japan) )

Publication title:

Smart structures, devices, and systems III : 11-13 December 2006, Adelaire, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6414

Pub. Year:

2007

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465221 [0819465224]

Language:

English

Call no.:

P63600/6414

Type:

Conference Proceedings

Details

TDL ID:	ZA00046726
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Structures, Devices, and Systems
Conf. info. (Number):	2006 : 3rd
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2006.12.11-2006.12.13

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