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Nickel silicide and titanium silicide formation: a comparison

Author(s):
Publication title:
Smart structures, devices, and systems III : 11-13 December 2006, Adelaire, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6414
Pub. Year:
2007
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819465221 [0819465224]
Language:
English
Call no.:
P63600/6414
Type:
Conference Proceedings

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