Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

Author(s):

Z. J. Wang ( Tohoku Univ. (Japan) )
H. Kokawa ( Tohoku Univ. (Japan) )
H. Takizawa ( Tohoku Univ. (Japan) )
M. Ichiki ( National Institute of Advanced Industrial Science and Technology (Japan) )
R. Maeda ( National Institute of Advanced Industrial Science and Technology (Japan) )

Publication title:

Smart materials IV : 11-13 December 2006, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6413

Pub. Year:

2007

Paper no.:

641308

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819465214 [0819465216]

Language:

English

Call no.:

P63600/6413

Type:

Conference Proceedings

Details

TDL ID:	ZA00046725
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart Materials
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	2006.12.11-2006.12.13
Note for article:	641308 ; 4th conference on smart materials, 11-13 December 2006, Adelaide, Australia

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