Accuracy problems in phase shift based 3D machine vision inspection systems

Accuracy problems in phase shift based 3D machine vision inspection systems

Author(s):

I. Dunin-Barkowski ( Synapse Imaging Co. (South Korea) )
J.-S. Kim ( Synapse Imaging Co. (South Korea) )

Publication title:

Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6382

Pub. Year:

2006

Paper no.:

63820F

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464804 [0819464805]

Language:

English

Call no.:

P63600/6382

Type:

Conference Proceedings

Details

TDL ID:	ZA00046717
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Two- and Three-Dimensional Methods for Inspection and Metrology
Conf. info. (Number):	2006 : 4th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2006.10.01-2006.10.03
Note for article:	63820F ; OPTICS EAST 2006, 1-4 October 2006, Boston, Massachusetts, USA

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