White light displacement sensor by spectro-polarization modulator

Author(s):

• Y. Otani ( Tokyo Univ. of Agriculture and Technology (Japan) )
• T. Wakayama ( Saitama Medical Univ. (Japan) )
• D. Orlov ( Tokyo Univ. of Agriculture and Technology (Japan) )
• N. Umeda ( Tokyo Univ. of Agriculture and Technology (Japan) )
• T. Yoshizawa ( Saitama Medical Univ. (Japan) )

Publication title:

Two- and three-dimensional methods for inspection and metrology IV : 1-3 October, 2006, Boston, Massachusetts, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6382

Pub. Year:

2006

Paper no.:

638205

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464804 [0819464805]

Language:

English

Call no.:

P63600/6382

Type:

Conference Proceedings