Calibration method with grating grooves based on precision vision measurement
- Author(s):
- Publication title:
- Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo -Electronic Technology, and Artificial Intelligence : 13-15 October 2006, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6357
- Pub. Year:
- 2006
- Pt.:
- 2
- Paper no.:
- 63573A
- Page(from):
- 63573A-1
- Page(to):
- 63573A-5
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464521 [081946452X]
- Language:
- English
- Call no.:
- P63600/6357
- Type:
- Conference Proceedings
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