Reliable Local Strain Characterization on Si/SiGe Structures in Biaxial Tension

Reliable Local Strain Characterization on Si/SiGe Structures in Biaxial Tension

Author(s):

Publication title:

Group IV semiconductor nanostructures--2006 : symposium held November 27-December 1, 2006, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

958

Pub. Year:

2007

Page(from):

151

Page(to):

158

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558999152 [1558999159]

Language:

English

Call no.:

M23500/958

Type:

Conference Proceedings

Details

TDL ID:	ZA00046622
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting : Symposium L
Conf. info. (Number):	2006
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2006.11.27-2006.12.01

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