Effect of Varying Dwell Time During Non-Melt Laser Annealing of Boron Implanted Silicon

Effect of Varying Dwell Time During Non-Melt Laser Annealing of Boron Implanted Silicon

Author(s):

Publication title:

Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

912

Pub. Year:

2006

Page(from):

131

Page(to):

136

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998681 [1558998683]

Language:

English

Call no.:

M23500/912

Type:

Conference Proceedings

Details

TDL ID:	ZA00046616
Series ID:	PA00000011
Conf. info. (Name):	MRS Spring Meeting : Symposium C
Conf. info. (Number):	2006
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	2006.04.18-2006.04.19

Similar Items:

1 Conference Proceedings Defect Evolution During Laser Annealing Susan B. Felch, Abhilash Mayur, Vijay Parihar, Faran Nouri, Kevin S. Jones, Daniel E. Zeenberg, Britta E. Jones Materials Research Society	7 Conference Proceedings Non-melt Laser Thermal Annealing of Shallow Boron Implantation for Back Surface Passivation of Backside-illuminated CMOS Image Sensors Zahra Ait Fqir Ali-Guerry, Karim Huet, Didier Dutartre, Rémi Beneyton, Daniel Bensahel, Philippe Normandon, Guo-Neng Lu Materials Research Society
2 Conference Proceedings Modeling and Experiments of Boron Diffusion Dduring Sub-Millisecond Non-Melt Laser Annealing in Silicon Taiji Noda, Susan Felch, Vijay Parihar, Christa Vrancken, Tom Janssens, Hugo Bender, Wilfried Vandervorst Materials Research Society	8 Conference Proceedings DIFFUSION AND ACTIVATION DURING RAPID THERMAL ANNEALING OF IMPLANTED BORON IN SILICON Cowern, N.E.B., Yallup, K.J., Godfrey, D.J., Hasko, D.G., McMahon, R.A., Ahmed, H., Stobbs, W.M., McPhail, D.S. Materials Research Society
3 Conference Proceedings Nonmelt Laser Annealing of 1 keV Boron Implanted Silicon Earles, Susan, Law, Mark E., Jones, Kevin, Talwar, Somit, Corcoran, Sean Materials Research Society	9 Conference Proceedings Optimization of Pre-Amorphization and Dopant Implant Conditions for Advanced Annealing Felch, S.B., Graoui, H., Mayur, A. Electrochemical Society
4 Conference Proceedings Ultra-Shallow Junctions Formed by Co-Implantation and Sub-Melt Laser Annealing S. B. Felch, A. Falepin, S. Seven, E. Augendre, T. Noda, V. Parihar, F. Nouri, T. Hoffinann, B. Pawlak, P. Eyben, W. … Electrochemical Society	10 Conference Proceedings The Effect of Oxide Trenches on Defect Formation and Evolution in Ion-Implanted Silicon Burbure, Nina, Jones, Kevin S. Materials Research Society
5 Conference Proceedings Enhanced Activation of Standard and Cocktail Spike Annealed Junctions With Additional Sub-Melt Laser Anneal Simone Severi, Emmanuel Augendre, Bartek J. Pawlak, Pierre Eyben, Taiji Noda, Susan Felch, Annelies Falepin, Vijay … Materials Research Society	11 Conference Proceedings Silicon melts during pulsed ruby laser annealing Stritzker, B., Pospieszczyk, A., Tagle, J.A. North Holland
6 Conference Proceedings Modeling and Experiments of Dopant Diffusion and Defects for Laser Annealed Junctions and Advanced USJ Taiji Noda, Wilfried Vandervorst, Susan Felch, Vijay Parihar, Christa Vrancken, Thomas Y. Hoffmann Materials Research Society	12 Conference Proceedings The Use of SiGe Barriers During the Formation of p+ Shallow Junctions by Ion Implantation Thompson, Phillip E., Bennett, Joe, Felch, Susan Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12