Growth of Crystalline Silicon Carbide by CVD Using Chlorosilane Gases
- Author(s):
M. J. Loboda M. F. MacMillan J. Wan G. Chung E. Carlson Y. Makarov A. Galyukov M. J. Molnar - Publication title:
- Silicon carbide 2006--materials, processing and devices : symposium held April 18-20, 2006, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 911
- Pub. Year:
- 2006
- Page(from):
- 49
- Page(to):
- 58
- Pages:
- 10
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998674 [1558998675]
- Language:
- English
- Call no.:
- M23500/911
- Type:
- Conference Proceedings
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