Low Specific Contact Resistance to 3C-SiC Grown on (100) Si Substrates

Low Specific Contact Resistance to 3C-SiC Grown on (100) Si Substrates

Author(s):

A.E. Bazin

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

721

Page(to):

724

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Micromachining of Thin 3C-SiC Films for Mechanical Properties Investigation J.F. Michaud, S. Jiao, A.E. Bazin, M. Portail, T. Chassagne, M. Zielinski, D. Alquier Materials Research Society	7 Conference Proceedings Novel 3C-SiC Microstructure for MEMS Applications J.F. Michaud, M. Portail, R. Khazaka, M. Zielinski, T. Chassagne Trans Tech Publications
2 Conference Proceedings P Implantation Effect on Specific Contact Resistance in 3C-SiC Grown on Si Anne-Elisabeth Bazin, Jean-François Michaud, Marc Portail, Thierry Chassagne, Marcin Zielinski, Jean-Marc Lecoq, … Materials Research Society	8 Conference Proceedings Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers S. Jiao, M. Zielinski, J.F. Michaud, T. Chassagne, M. Portail Trans Tech Publications
3 Conference Proceedings 3C-SiC: New Interest for MEMS Devices J.F. Michaud, M. Portail, T. Chassagne, M. Zielinski, D. Alquier Trans Tech Publications	9 Conference Proceedings Structural and Morphological Characterization of 3C-SiC Films Grown on (111), (211) and (100) Silicon Substrates M. Portail, M. Nemoz, M. Zielinski, T. Chassagne Trans Tech Publications
4 Conference Proceedings Elaboration of Monocrystalline Si Thin Film on 3C-SiC(100)/Si Epilayers by Low Pressure Chemical Vapor Deposition S. Jiao, M. Portail, J.F. Michaud, M. Zielinski, T. Chassagne Trans Tech Publications	10 Conference Proceedings Thermally Induced Surface Reorganization of 3C-SiC(111) Epilayers Grown on Silicon Substrates M. Portail, T. Chassagne, S. Roy, C. Moisson, M. Zielinski Trans Tech Publications
5 Conference Proceedings Analytical Model of Stress Relaxation in 3C SiC Layers on Silicon M. Zielinski, J.F. Michaud, S. Jiao, T. Chassagne, A.E. Bazin Trans Tech Publications	11 Conference Proceedings ICP Etching of 4H-SiC Substrates J. Biscarrat, J.F. Michaud, E. Collard, D. Alquier Trans Tech Publications
6 Conference Proceedings Strain in 3C-SiC Heteroepitaxial Layers Grown on (100) and (111) Oriented Silicon Substrates M. Zielinski, M. Portail, T. Chassagne, Y. Cordier Trans Tech Publications	12 Conference Proceedings Structural Study of the Innovative 3C-SiC/Si/3C-SiC/Si Heterostructure for Electro-Mechanical Applications R. Khazaka, M. Portail, P. Vennéguès, D. Alquier, J.F. Michaud Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12