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X-Ray and AFM Analysis of Al2O3 Deposited by ALCVD on n-Type 4H-SiC

Author(s):
U. Grossner
M. Servidori
M. Avice
O. Nilsen
H. Fjellvag
R. Nipoti
B.G. Svensson
2 more
Publication title:
Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006
Title of ser.:
Materials science forum
Ser. no.:
556-557
Pub. Year:
2007
Page(from):
683
Page(to):
686
Pages:
4
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494422 [0878494421]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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