Ellipsometric and MEIS Studies of 4H-SiC/Si/SiO2 and 4H-SiC/SiO2 Interfaces for MOS Devices

Ellipsometric and MEIS Studies of 4H-SiC/Si/SiO2 and 4H-SiC/SiO2 Interfaces for MOS Devices

Author(s):

O.J. Guy

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

509

Page(to):

512

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces, and Sacrificial Oxide Stripped 4H-SiC Surfaces Guy, O.J., Chen, L., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	7 Conference Proceedings The Formation of Low Resistance Ohmic Contacts to 4H-SiC, Circumventing the Need for Post Annealing, Studied by Specific Contact Resistance Measurements and … Guy, O.J., Pope, G., Blackwood, I., Teng, K.S., Lee, W.Y., Wilks, S.P., Mawby, P.A. Trans Tech Publications
2 Conference Proceedings Investigation of Graphene Growth on 4H-SiC A. Castaing, O.J. Guy, M. Lodzinski, S.P. Wilks Trans Tech Publications	8 Conference Proceedings A Study of the Shallow Electron Traps at the 4H-SiC/SiO2 Interface Olafsson, H.O., Sveinbjornsson, E.O., Rudenko, T.E., Kilchytska, V.I., Tyagulski, I.P., Osiyuk, I.N. Trans Tech Publications
3 Conference Proceedings Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC Chen, L., Guy, O.J., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	9 Conference Proceedings Optimizing the Thermally Oxidized 4H-SiC MOS Interface for P-Channel Devices M. Das, S.K. Haney, C. Jonas, Q.C. Zhang, S.H. Ryu Trans Tech Publications
4 Conference Proceedings Metal Contacts to Boron-Doped Diamond M. Lodzinski, O.J. Guy, A. Castaing, S. Batcup, S.P. Wilks Trans Tech Publications	10 Conference Proceedings Characterisation of HfO₂/Si/SiC MOS Capacitors P.M. Gammon, A. Pérez-Tomás, M.R. Jennings, O.J. Guy, N. Rimmer Trans Tech Publications
5 Conference Proceedings Investigation of Si/4H-SiC Hetero-Junction Growth and Electrical Properties O.J. Guy, A. Pérez-Tomás, M.R. Jennings, M. Lodzinski, A. Castaing Trans Tech Publications	11 Conference Proceedings Interface Properties of 4H-SiC/SiO2 with MOS Capacitors and FETs Annealed in O2, N2O, NO and CO2 Wang, W., Banerjee, S., Chow, T.P., Gutmann, R.J., Issacs-Smith, T., Williams, J., Jones, K.A., Lelis, A., Tipton, W., … Trans Tech Publications
6 Conference Proceedings Silicon-on-SiC, a Novel Semiconductor Structure for Power Devices M.R. Jennings, A. Pérez-Tomás, O.J. Guy, M. Lodzinski, P.M. Gammon Trans Tech Publications	12 Conference Proceedings Inversion-Channel MOS Devices for Characterization of 4H-SiC/SiO₂ Interfaces A.I. Mikhaylov, A.V. Afanasyev, V.V. Luchinin, S.A. Reshanov, A. Schöner Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12