FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS

Author(s):

J. Pezoldt

Publication title:

Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006

Title of ser.:

Materials science forum

Ser. no.:

556-557

Pub. Year:

2007

Page(from):

363

Page(to):

366

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494422 [0878494421]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00046610
Series ID:	PA00000012
Conf. info. (Name):	European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	6th
Conf. info. (Venue):	Newcastle upon Tyne, UK
Conf. info. (Date):	2006.09.00

Similar Items:

1 Conference Proceedings Micromachining of Novel SiC on Si Structures for Device and Sensor Applications Foerster, C., Cimalla, V., Stubenrauch, M., Rockstuhl, C., Brueckner, K., Hein, M., Pezoldt, J., Ambacher, O. Trans Tech Publications	7 Conference Proceedings High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates Weih, P., Cimalla, V., Forster, C., Pezoldt, J., Stauden, Th., Spiess, L., Romanus, H., Hermann, M., Eickhoff, M., … Trans Tech Publications
2 Conference Proceedings Performance Modification of SiC MEMS F. Niebelschutz, K. Bruckner, V. Cimalla, M.A. Hein, J. Pezoldt Trans Tech Publications	8 Conference Proceedings Structure and Composition of 3C-SiC:Ge Alloys Grown on Si (111) Substrates by SSMBE Weih, P., Cimalla, V., Stauden, Th., Kosiba, R., Spies, L., Romanus, H., Gubisch, M., Bock, W., Freitag, Th., Fricke, … Trans Tech Publications
3 Conference Proceedings Morphology and Stress Control in UHVCVD of 3C-SiC(100) on Si J. Pezoldt, C. Foerster, T. Stauden, V. Cimalla, F.M. Morales, C. Zgheib, P.M. Masri, O. Ambacher Trans Tech Publications	9 Conference Proceedings Stress Manipulation in CVD grown SiC on Si bv Mono- and submonolaver Ge Drecoverages Pezoldt, J., Zgheib, Ch., Morales, F. M., Forster, Ch., Stauden, Th., Wang, Ch., Masri, P., Leycuras, A., Ferro, G., … Electrochemical Society
4 Conference Proceedings Etching of SiC with Fluorine ECR Plasma Foerster, Ch., Cimalla, V., Kosiba, R., Ecke, G., Weih, P., Ambacher, O., Pezoldt, J. Trans Tech Publications	10 Conference Proceedings Influence of the Ge Coverage Prior to Carbonization on the Structure of SiC Grown on Si(111) Morales, F.M., Zgheib, Ch., Molina, S.I., Araujo, D., Garcia, R., Fernandez, C., Sanz-Hervas, A., Masri, P., Weih, P., … Trans Tech Publications
5 Conference Proceedings Low Energy Ion Modification of 3C-SiC Surfaces Forster, C., Kosiba, R., Ecke, G., Cimalla, V., Ambacher, O., Pezoldt, J. Trans Tech Publications	11 Conference Proceedings Buckling Stabilization and Stress Reduction in SiC on Si by i-FLASiC Processing A. Andreadou, J. Pezoldt, C. Förster, E.K. Polychroniadis, M. Voelskow Trans Tech Publications
6 Conference Proceedings Low Temperature Chemical Vapor Deposition of 3C-SiC on Si Substrates Forster, C., Cimalla, V., Ambacher, O., Pezoldt, J. Trans Tech Publications	12 Conference Proceedings The Measurement of the Thickness of Thin SiC Layers on Silicon Cimalla,V., Scheiner,J., Ecke,G., Friedrich,M., Goldhahn,R., Zahn,D.R.T., Pezoldt,J. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12