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Simple method to verify OPC data based on exposure condition [6156-40]

Author(s):
  • Moon, J. ( Hynix Semiconductor Inc. (South Korea) )
  • Ahn, Y.-B. ( Hynix Semiconductor Inc. (South Korea) )
  • Oh, S.-Y ( Hynix Semiconductor Inc. (South Korea) )
  • Nam, B.-H ( Hynix Semiconductor Inc. (South Korea) )
  • Yim, D. G. ( Hynix Semiconductor Inc. (South Korea) )
Publication title:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6156
Pub. Year:
2006
Page(from):
61561C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461995 [0819461997]
Language:
English
Call no.:
P63600/6156
Type:
Conference Proceedings

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