Self-compensating design for reduction of timing and leakage sensitivity to systematic pattern dependent variation [6156-10]
- Author(s):
- Gupta, P. ( Blaze DFM Inc. (USA) )
- Kahng, A. B. ( Blaze DFM Inc. (USA) )
- Kim, Y. ( Univ. of Michigan, Ann Arbor (USA) )
- Sylvester, D. ( Univ. of Michigan, Ann Arbor (USA) )
- Publication title:
- Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6156
- Pub. Year:
- 2006
- Page(from):
- 61560B
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461995 [0819461997]
- Language:
- English
- Call no.:
- P63600/6156
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Modeling of non-uniform device geometries for post-lithography circuit analysis [6156-54]
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Design and Validation of Self-Compensating Melt Regulator for Plastics Extrusion
Society of Plastics Engineers |
2
Conference Proceedings
Toward performance-driven reduction of the cost of RET-based lithography control (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Improving OPC quality via interactions within the design-to-manufacturing flow (Invited Paper) [5853-99]
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Joining the design and mask flows for better and cheaper masks (Invited Paper)
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Layout verification and optimization based on flexible design rules [6156-09]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Modeling edge placement error distribution in standard cell library [6156-57]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |