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Optimization method for transparent conducting oxide films prepared by DC magnetron sputtering [6149-80]

Author(s):
Wang, J. ( Univ. of Electronic Science and Technology of China (China) )
Cheng, J. ( Univ. of Electronic Science and Technology of China (China) )
Lin, H. ( Univ. of Electronic Science and Technology of China (China) )
Jiang, Q. ( Univ. of Electronic Science and Technology of China (China) )
Yang, G. ( Univ. of Electronic Science and Technology of China (China) )
Jiang, Y. ( Univ. of Electronic Science and Technology of China (China) )
1 more
Publication title:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6149
Pub. Year:
2006
Page(from):
614928
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461889 [0819461881]
Language:
English
Call no.:
P63600/6149
Type:
Conference Proceedings

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