Blank Cover Image

Application of CPL mask for whole chip 5nm DRAM patterning [5853-69]

Author(s):
Lin, 0. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Hung, R. ( Nanya Technology Corp. (Taiwan) )
Lee, B. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Wu, Y.-H. ( Nanya Technology Corp. (Taiwan) )
Kozuma, M. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Shih, C.-L.
Lin, J. ( Nanya Technology Corp. (Taiwan) )
Hsu, M.
Hsu, S. D. ( ASML MaskTools, Inc. (USA) )
4 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology XII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5853
Pub. Year:
2005
Pt.:
2
Page(from):
835
Page(to):
843
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458537 [0819458538]
Language:
English
Call no.:
P63600/5853
Type:
Conference Proceedings

Similar Items:

Lee, B., Hung, R., Lin, O., Wu, Y.-H., Kozuma, M., Shih, C.-L., Hsu, M., Hsu, S. D.

SPIE - The International Society of Optical Engineering

Kasprowicz, B.S., Conley, W.E., Litt, L.C., Van Den Broeke, D.J., Montgomery, P.K., Socha, R.J., Wu, W., Lucas, K.D., …

SPIE - The International Society of Optical Engineering

Litt, L. C., Conley, W., Wu, W., Peters, R., Parker, C., Cobb, J., Kasprowicz, B. S., van den Broeke, D., Park, J. C., …

SPIE - The International Society of Optical Engineering

H. J. Liu, W. H. Hsieh, C. H. Yeh, J. S. Wu, H. W. Chan, W. B. Wu, F. Y. Chen, T. Y. Huang, C. L. Shih, J. P. Lin

SPIE - The International Society of Optical Engineering

Conley, W., Broeke, D.J.V.D., Socha, R.J., Wu, W., Litt, L.C., Lucas, K., Nelson-Thomas, C.M., Roman, B.J., Chen, F., …

SPIE-The International Society for Optical Engineering

Kuijten, J. P., Verhappen, A., Conley, W., van de Goor, S., Litt, L., Wu, W., Lucas, K., Roman, B., Kasprowicz, B., …

SPIE - The International Society of Optical Engineering

Hung,K.-C., Lin,B.S.-M., Chang,H.-A., Tseng,A., Chung,L.-S., Liu,W.-J., Wu,D.-Y., Huang,P.

SPIE - The International Society for Optical Engineering

H. Shih, C. Lee, Y. Chen, C. Wu, C. Hsu

Electrochemical Society

Chang, Y. Y., Wu, Y.-H., Shih, C.-L., Lin, J., Kan, F.

SPIE - The International Society of Optical Engineering

Conley, W., Van Den Broeke, D.J., Socha, R.J., Wu, W., Litt, L.C., Lucas, K.D., Roman, B.J., Peters, R.D., Parker, C., …

SPIE - The International Society of Optical Engineering

Lin, J., Hsu, M., Hsu, T., Hsu, S.D., Shi, X., Van Den Broeke, D.J., Chen, J.F., Tang, F.C., Hsieh, W.A., Huang, C.Y.

SPIE - The International Society of Optical Engineering

T. Chin, W. B. Wu, C. L. Shih, P. C. Fan, G. B. Zvi

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12