Lithography process related OPC development and verification demonstration on a sub-9Onm poly layer [5853-52]
- Author(s):
- Hung, C.-Y.
- Liu, Q. ( Semiconductor Manufacturing International Corp. (China) )
- Zhang, L. ( Mentor Graphics Corp. (China) )
- Shang, S.
- Jost, A. ( Mentor Graphics Corp. (USA) )
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology XII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5853
- Pub. Year:
- 2005
- Pt.:
- 2
- Page(from):
- 678
- Page(to):
- 685
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458537 [0819458538]
- Language:
- English
- Call no.:
- P63600/5853
- Type:
- Conference Proceedings
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