A study of storage life extension for high performance chemically amplified resist coated blanks [5853-03]
- Author(s):
Yang, S.-J. Seo, S.-M. Ko, S.-H. Cha, H.-S. Kang, G.-W. Nam, K.-S. ( S&S TECH Corp. (South Korea) ) Seo. W.-W. Jung, W.-K. Cho, H.-K. Kim, J.-M. Choi, S.-S. ( Photronics-PKL (South Korea) ) - Publication title:
- Photomask and Next-Generation Lithography Mask Technology XII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5853
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 20
- Page(to):
- 30
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458537 [0819458538]
- Language:
- English
- Call no.:
- P63600/5853
- Type:
- Conference Proceedings
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