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AFM benchmark for the profile characterisation of subwavelength diffactive elements within the EC Network of Excellence on Micro-Optics (NEMO) [6188-58]

Author(s):
Destouches, N. ( Lab. Traitement du Signal et Instrumentation, CNRS, Univ. Jean Monnet Saint-Etienne (France) )
Herzig, P. H.
Nakagawa, W. ( Univ. de Neuchatel (Switzerland) )
Ottevaere, H. ( Vrije Univ. Brussel (Belgium) )
Pietarinen, J. ( Univ. of Joensuu (Finland) )
Reynaud, S. ( Lab. Traitement du Signal et Instrumentation, CNRS, Univ. Jean Monnet Saint-Etienne (France) )
Tervo, J. ( Univ. of Joensuu (Finland) )
Tonchev, S. ( Lab. Traitement du Signal et Instrumentation, CNRS, Univ. Jean Monnet Saint-Etienne (France) )
Turunen, J. ( Univ. of Joensuu (Finland) )
Van Erps, J. ( Vrije Univ. Brussel (Belgium) )
Kujawinska, M. ( Warsaw Univ. of Technology (Poland) )
6 more
Publication title:
Optical Micro- and Nanometrology in Microsystems Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6188
Pub. Year:
2006
Page(from):
61881K
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462442 [0819462446]
Language:
English
Call no.:
P63600/6188
Type:
Conference Proceedings

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