Characterization of particle contamination for optical application [6188-55]

Characterization of particle contamination for optical application [6188-55]

Author(s):

Tovena, I.
Palmier, S.
Garcia, S.
Manac’h, P. ( CEA-CESTA (France) )
Sellier, E. ( CREMEM (France) )

Publication title:

Optical Micro- and Nanometrology in Microsystems Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6188

Pub. Year:

2006

Page(from):

61881H

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462442 [0819462446]

Language:

English

Call no.:

P63600/6188

Type:

Conference Proceedings

Details

TDL ID:	ZA00016413
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : Optical Micro- and Nanometrology in Microsystems Technology
Conf. info. (Number):	2006
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2006.04.05-2006.04.07

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