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An integrated approach for photonic crystal inspection and characterization [6188-10]

Author(s):
Tiribilli, B. ( Istituto Sistemi Complessi, CNR (Italy) )
Ferraro, P.
Grilli, S.
Molesini, G.
Vannoni, M. ( Istituto Nazionale di Ottica Applicata, CNR (Italy) )
Vassalli, M. ( Istituto Sistemi Complessi, CNR (Italy) )
1 more
Publication title:
Optical Micro- and Nanometrology in Microsystems Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6188
Pub. Year:
2006
Page(from):
61880A
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462442 [0819462446]
Language:
English
Call no.:
P63600/6188
Type:
Conference Proceedings

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