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The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer [6186-33]

Author(s):
Publication title:
MEMS, MOEMS, and Micromachining II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6186
Pub. Year:
2006
Page(from):
61860W
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462428 [081946242X]
Language:
English
Call no.:
P63600/6186
Type:
Conference Proceedings

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