Management and verification for MEMS fabrication processes [6186-27]
- Author(s):
Schmidt T. ( Univ. of Siegen (Germany) ) Ortloff D. ( Cavendish Kinetics (Netherlands) ) Hahn K. Wagener A. Popp J. Bruck R. ( Univ. of Siegen (Germany) ) - Publication title:
- MEMS, MOEMS, and Micromachining II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6186
- Pub. Year:
- 2006
- Page(from):
- 61860S
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819462428 [081946242X]
- Language:
- English
- Call no.:
- P63600/6186
- Type:
- Conference Proceedings
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