Tunable InP/air MOEMS filter with record breaking selectivity [6186-17]

Tunable InP/air MOEMS filter with record breaking selectivity [6186-17]

Author(s):

Garrigues M.
Danglot J.
Leclercq J.-L ( Ecole Centrale de Lyon, Lab. of Electronics, Optoelectronics and Microsystems, CNRS (France) )

Publication title:

MEMS, MOEMS, and Micromachining II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6186

Pub. Year:

2006

Page(from):

61860I

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462428 [081946242X]

Language:

English

Call no.:

P63600/6186

Type:

Conference Proceedings

Details

TDL ID:	ZA00016411
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : MEMS, MOEMS, and Micromachining
Conf. info. (Number):	2006 : 2nd
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2006.04.03-2006.04.04

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