Parallel atomic force microscopy using optical heterodyne detection [6186-11 ]

Parallel atomic force microscopy using optical heterodyne detection [6186-11 ]

Author(s):

Chantada L. ( Univ. of Santiago de Compostela (Spain) )

Staufe U. ( Univ. of Neuchatel (Switzerland) )

Vettiger P. ( Univ. of Neuchatel (Switzerland), CSEM SA (Switzerland) )

Weible K. ( Suss Micro-Optics S.A. (Switzerland) )

Herzig H. P ( Univ. of Neuchatel (Switzerland) )

4 more

Publication title:

MEMS, MOEMS, and Micromachining II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6186

Pub. Year:

2006

Page(from):

61860B

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819462428 [081946242X]

Language:

English

Call no.:

P63600/6186

Type:

Conference Proceedings

Details

TDL ID:	ZA00016411
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : MEMS, MOEMS, and Micromachining
Conf. info. (Number):	2006 : 2nd
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2006.04.03-2006.04.04

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