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Prototyping micro-optical components with integrated out-of-plane coupling structures using deep lithography with protons (Invited Paper) [6185-04]

Author(s):
Publication title:
Micro-Optics, VCSELs, and Photonic Interconnects II: Fabrication, Packaging, and Integration
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6185
Pub. Year:
2006
Page(from):
618504
Page(to):
618504
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462411 [0819462411]
Language:
English
Call no.:
P63600/6185
Type:
Conference Proceedings

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