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Tunable micro-electromechanical grating in silicon (Invited Paper) [6376-03]

Author(s):
Publication title:
Optomechatronic Micro/Nano Devices and Components II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6376
Pub. Year:
2006
Page(from):
637604
Page(to):
637604
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464743 [0819464740]
Language:
English
Call no.:
P63600/6376
Type:
Conference Proceedings

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