Simultaneous measurement of film surface topography and thickness variation using white-light interferometry (Invited Paper) [6375-07]

Simultaneous measurement of film surface topography and thickness variation using white-light interferometry (Invited Paper) [6375-07]

Author(s):: Kitagawa, K. ( Toray Engineering Co., Ltd. (Japan) )
Publication title:: Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 6375
Pub. Year:: 2006
Page(from):: 637507
Page(to):: 637507
Pages:: 1
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819464736 [0819464732]
Language:: English
Call no.:: P63600/6375
Type:: Conference Proceedings

Details

TDL ID:	ZA00016375
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems
Conf. info. (Number):	2006
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2006.10.03

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