An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators [6374B-27]

An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro-actuators [6374B-27]

Author(s):

Zhu, G.
Chianetta, J. -F.
Hosseini, M.
Peter, Y. -A. ( Ecole Polytechnique de Montreal (Canada) )

Publication title:

Optomechatronic Actuators, Manipulation, and Systems Control

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6374

Pub. Year:

2006

Page(from):

63740V

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464729 [0819464724]

Language:

English

Call no.:

P63600/6374

Type:

Conference Proceedings

Details

TDL ID:	ZA00016374
Series ID:	PA00000029
Conf. info. (Name):	Optics East : Optomechatronic Actuators, Manipulation, and Systems Control
Conf. info. (Number):	2006
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2006.10.01-2006.10.03

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