A novel capacitive type miniature microphone with a flexure hinge diaphragm [6374A-37]
- Author(s):
- Kim, H. J.
- Lee, S. Q.
- Park, K. H. ( Electronics and Telecommunications Research Institute (South Korea) )
- Publication title:
- Optomechatronic Actuators, Manipulation, and Systems Control
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6374
- Pub. Year:
- 2006
- Page(from):
- 63740H
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464729 [0819464724]
- Language:
- English
- Call no.:
- P63600/6374
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A Miniature Silicon Condenser Microphone Improved with a Flexure Hinge Diaphragm and a Large Back Volume
Materials Research Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Design and analysis on micro-worktable using novel symmetric flexure hinge based on micro-assembly [6040-15]
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
PMN-PT piezoelectric near field optical probe for data storage (Invited Paper) [6374A-10]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Micro/nano-scale integration of polymer optical wires and miniaturized photonic devices for optical printed circuit board (O-PCB) and VLSI photonic applications …
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Dynamic Characteristics of Circular and Square Graphene Diaphragm for Capacitive Microphone
Trans Tech Publications |
12
Conference Proceedings
Fabrication and Characterization of Miniaturized SOFC by Colloidal Process
Electrochemical Society |