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Simultaneous measurement of nanometric longitudinal displacement and micrometric lateral displacement by using one line CCD camera [6374A-08]

Author(s):
Publication title:
Optomechatronic Actuators, Manipulation, and Systems Control
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6374
Pub. Year:
2006
Page(from):
637408
Page(to):
637408
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464729 [0819464724]
Language:
English
Call no.:
P63600/6374
Type:
Conference Proceedings

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