Mechanical-electrostatic coupling research for MEMS line vibration gyroscope [6358-09]

Author(s):

• Guo, Q.
• Sun, F.
• Zhao, L.
• Ben, Y. ( Harbin Engineering Univ. (China) )

Publication title:

Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6358

Pub. Year:

2006

Pt.:

1

Page(from):

635809

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819464538 [0819464538]

Language:

English

Call no.:

P63600/6358

Type:

Conference Proceedings