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Advanced manufacturing rules check (MRC) for fully automated assessment of complex reticle designs: Part II [6349-145]

Author(s):
Straub, J. A.
Aguilar, D.
Buck, P. D.
Dawkins, D.
Gladhill, R.
Nolke, S.
Riddick, J. ( Toppan Photomasks, Inc. (USA) )
2 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
2
Page(from):
63493W
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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