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The automatic back-check mechanism of mask tooling database and automatic transmission of mask tooling data [6349-141]

Author(s):
Xu, Z.
Peng, M. G.
Tu, L. H.
Lee, C.
Lin, J. K.
Jan, J. F.
Yin, A.
Wang, P. ( He Jian Technology Co., Ltd. (China) )
3 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
2
Page(from):
63493S
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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