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Adding grayscale layer to chrome photomasks [6349-117]

Author(s):
Poon, D. K.
Dykes, J. M.
Choo, C.
Tsui, J. T. K.
Wang, J.
Chapman, G. H. ( Simon Fraser Univ. (Canada) )
Tu, Y.
Reynolds, P.
Zanzal, A. ( Benchmark Technologies (USA) )
4 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
2
Page(from):
634931
Page(to):
634931
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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