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PPC model build methodology: sequential litho and etch verification [6349-72]

Author(s):
Mokhberi, A.
Kamat, V.
Sezginer, A:
Zach, F. X.
Percin, G.
Carrero, J.
Huang, H.-T. ( Invarium Inc. (USA) )
2 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
1
Page(from):
63491Z
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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