Extension of 193 nm dry lithography to 45-nm half-pitch node: double exposure and double processing technique [6349-62]
- Author(s):
- Biswas, A. M.
- Li, J.
- Hiserote, J. A.
- Melvin III, L. S. ( Synopsys, Inc. (USA) )
- Publication title:
- Photomask Technology 2006
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6349
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 63491P
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464446 [0819464449]
- Language:
- English
- Call no.:
- P63600/6349
- Type:
- Conference Proceedings
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