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Metrics to assess fracture quality for variable shaped beam lithography [6349-169]

Author(s):
Bloecker, M. ( Advanced Mask Technology Ctr. (Germany) )
Gladhill, R.
Buck, P. D. ( Toppan Photomasks, Inc. (USA) )
Kempf, M. ( Advanced Mask Technology Ctr. (Germany) )
Aguilar, D. ( Toppan Photomasks, Inc. (USA) )
Cinque, R. B. ( Advanced Mask Technology Ctr. (Germany) )
1 more
Publication title:
Photomask Technology 2006
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
Pub. Year:
2006
Pt.:
1
Page(from):
63490Z
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819464446 [0819464449]
Language:
English
Call no.:
P63600/6349
Type:
Conference Proceedings

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