The study of optical performance for quartz dry etching quality in ArF lithography [6349-12]
- Author(s):
Ahn, W.-S. Lee, H.-K. Park, Y.-J. Kwon, H.-J. Choi, S.-W. Han, W.-S. ( Samsung Electronics Co. (South Korea) ) - Publication title:
- Photomask Technology 2006
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6349
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 63490C
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464446 [0819464449]
- Language:
- English
- Call no.:
- P63600/6349
- Type:
- Conference Proceedings
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