2D InP photonic cyrstal fabrication process development [6327-49]
- Author(s):
- Rong, B.
- van der Drift, E. ( Delft Univ. of Technology (Netherlands) )
- van der Heijden, R. W. ( COBRA Inter-Univ. Research Institute Eindhoven Univ. of Technology (Netherlands) )
- Salemink, H. W. M. ( Delft Univ. of Technology (Netherlands) )
- Publication title:
- Nanoengineering : fabrication, properties, optics, and devices III : 15-17 August, 2006, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6327
- Pub. Year:
- 2006
- Page(from):
- 632715
- Page(to):
- 632715
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464064 [0819464066]
- Language:
- English
- Call no.:
- P63600/6327
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Deep dry etching process development for photonic crystals in InP-based planar waveguides
SPIE - The International Society of Optical Engineering |
MRS-Materials Research Society |
2
Conference Proceedings
InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals [6322-05]
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Design, fabrication, and integration of micro/nano-scale photonic cyrstal devices and plasmonic devices for VLSI photonic integration application (Invited …
SPIE - The International Society of Optical Engineering |
3
Conference Proceedings
Feature size effects in chemically assisted ion beam etching of InP-based photonic cyrstals [6327-07]
SPIE - The International Society of Optical Engineering | |
4
Conference Proceedings
Two-dimensional photonic crystals from semiconductor material with polymer filled holes [6182-31]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
11
Conference Proceedings
Photonic cyrstal and photonic wire device structures (Invited Paper)[5950-04]
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Fabrication of autocloned photonic cyrstals by using electron-beam gun with ion-assisted deposition [6327-08]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |