Feature size effects in chemically assisted ion beam etching of InP-based photonic cyrstals [6327-07]
- Author(s):
Berrier, A. Mulot, M. ( Royal Institute of Technology (Sweden) ) Talneau, A. ( CNRS-LPN (France) ) Ferrini, R. Houdre, R. ( Ecole Polytechnique Federale (Switzerland) ) Anand, S. ( Royal Institute of Technology (Sweden) ) - Publication title:
- Nanoengineering : fabrication, properties, optics, and devices III : 15-17 August, 2006, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6327
- Pub. Year:
- 2006
- Page(from):
- 632707
- Page(to):
- 632707
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819464064 [0819464066]
- Language:
- English
- Call no.:
- P63600/6327
- Type:
- Conference Proceedings
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