Optical constants in the EUV soft x-ray (5÷152nm) spectral range of B2C thin films deposited by different deposition techniques [6317-38]

Optical constants in the EUV soft x-ray (5÷152nm) spectral range of B2C thin films deposited by different deposition techniques [6317-38]

Author(s):

Monaco, G.

Garoli, D.

Frison, R. ( CNR-INFM LUXOR Lab., DEI Univ. Padova (Italy) )

Mattarello, V. ( Istituto Nazionale di Fisica Nucleare (Italy) )

Nicolosi, P.

Pelizzo, G. M. ( CNR-INFM LUXOR Lab., DEI Univ. Padova (Italy) )

Rigato, V. ( Istituto Nazionale di Fisica Nucleare (Italy) )

Armelao, L. ( Univ. Padova (Italy) )

Giglia, A.

Nannarone, S. ( ELETTRA/BEAR Synchrotron Trieste (Italy) )

5 more

Publication title:

Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6317

Pub. Year:

2006

Page(from):

631712

Page(to):

631712

Pages:

1

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819463968 [0819463965]

Language:

English

Call no.:

P63600/6317

Type:

Conference Proceedings

Details

TDL ID:	ZA00016323
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advances in X-ray/EUV optics, components, and applications
Conf. info. (Number):	2006
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2006.08.14-2006.08.16

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