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Understanding DC-bias sputtered thorium oxide thin films useful in EUV optics [6317-37]

Author(s):
Publication title:
Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6317
Pub. Year:
2006
Page(from):
631711
Page(to):
631711
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463968 [0819463965]
Language:
English
Call no.:
P63600/6317
Type:
Conference Proceedings

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