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Computer aided alignment using Zernike coefficients [6293-18]

Author(s):
Yang H.-S. ( Korea Research Institute of Standards and Science (South Korea) )
Kim S.-H. ( Yonsei Univ. (South Korea) and Korea Research Institute of Standards and Science (South Korea) )
Lee Y.-W.
Song J.-B.
Rhee H.-G.
Lee H.-Y.
Lee J.-H.
Lee I.-W. ( Korea Research Institute of Standards and Science (South Korea) )
Kim S.-W. ( Yonsei Univ. (South Korea) )
4 more
Publication title:
Interferometry XIII: Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6293
Pub. Year:
2006
Page(from):
62930I
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463722 [0819463728]
Language:
English
Call no.:
P63600/6293
Type:
Conference Proceedings

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