Interferometric testing through transmissive media [6293-05]
- Author(s):
- Han S. ( Veeco Metrology Inc. (USA) )
- Publication title:
- Interferometry XIII: Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6293
- Pub. Year:
- 2006
- Page(from):
- 629305
- Page(to):
- 629305
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463722 [0819463728]
- Language:
- English
- Call no.:
- P63600/6293
- Type:
- Conference Proceedings
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