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Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift [6292-27]

Author(s):
Hibino, K. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Tani, Y. ( Univ. of Tokyo (Japan) )
Takatsuji, T.
Bitou, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Warisawa, S.
Mitsuishi, M. ( Univ. of Tokyo (Japan) )
1 more
Publication title:
Interferometry XIII: Techniques and Analysis
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6292
Pub. Year:
2006
Page(from):
62920Q
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463715 [081946371X]
Language:
English
Call no.:
P63600/6292
Type:
Conference Proceedings

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