Ray-trace simulation of the random ball test to improve microlens metrology [6292-04]
- Author(s):
- Gardner, N. W.
- Davies, A. D. ( Univ. of North Carolina at Charlotte (USA) )
- Publication title:
- Interferometry XIII: Techniques and Analysis
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6292
- Pub. Year:
- 2006
- Page(from):
- 629204
- Page(to):
- 629204
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819463715 [081946371X]
- Language:
- English
- Call no.:
- P63600/6292
- Type:
- Conference Proceedings
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