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Advanced hybrid mask process development [6283-23]

Author(s):
Lin, O.
Chou, J. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
fu, K. K. ( Nanya Technology Corp. (Taiwan) )
Lee, B. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Lu, R. ( Nanya Technology Corp. (Taiwan) )
Lu, J. ( Toppan Chunghwa Electronics Corp. (Taiwan) )
Shi, -L. C. ( Nanya Technology Corp. (Taiwan) )
2 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology XIII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6283
Pub. Year:
2006
Pt.:
2
Page(from):
62831S
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819463586 [0819463582]
Language:
English
Call no.:
P63600/6283
Type:
Conference Proceedings

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